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NiO-In2O3 composite nanofibers are synthesized via electrospinning and calcining techniques.Micro-sensors are fabricated by sputtering Pt electrodes on Si chips to form sensor substrates,and then spinning the NiO-In2O3 composite nanofibers onto the sensor substrate surface.The as-fabricated micro-sensors exhibit excellent H2S sensing properties at room temperature.The sensitivity of the micro-sensors is up to 6 when the sensors are exposed to 3μL/LH2S,and the corresponding response and recovery times are 14 and 22 s,respectively.The micro-sensors also exhibit high selectivity and good stability.Especially,the micro-sensors can operate at various humidity conditions.The sensitivity of the micro-sensors is 3.8 to 3μL/LH2S at 75% relative humidity.These characteristics make the micro-sensors good candidates for practical H2S sensors with high performance.
NiO-In2O3 composite nanofibers are synthesized via electrospinning and calcining techniques. Micro-sensors are fabricated by sputtering Pt electrodes on Si chips to form sensor substrates, and then spinning the NiO-In2O3 composite nanofibers onto the sensor substrate surface. -sensors exhibit excellent H2S sensing properties at room temperature. The sensitivity of the micro-sensors is up to 6 when the sensors are exposed to 3 μL / LH2S, and the respective responses and recovery times are 14 and 22 s, respectively. The micro- sensors also exhibit high selectivity and good stability. Especially, the micro-sensors can operate at various humidity conditions. The sensitivity of the micro-sensors is 3.8 to 3 μL / LH2S at 75% relative humidity. for practical H2S sensors with high performance.