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Mo合金在电子束区域熔炼过程中,熔区的稳定性对于材料的提纯和单晶生长至关重要。熔区稳定性实质是电子束区域熔炼炉高压电源系统电参数稳定性的体现,而电子束区域熔炼炉高压电源系统电参数失稳的因素较多。针对Mo合金区域熔炼过程高压电源系统电参数失稳的现象,本文分析了产生电参数失稳的原因,包括阳极棒料、真空度、熔炼过程产生的涂覆物和高压电源系统自身的等效内阻、控制电路响应时间等,并提出了相应的解决措施。结果表明,综合考虑上述几方面的影响因素并采取相应的解决措施,区域熔炼过程中高压电源系统电参数失稳问题可以得到有效解决。
Mo alloy melting in the electron beam region, the stability of the molten metal for the purification and single crystal growth is crucial. The stability of the melting zone is essentially the stability of the electrical parameters of the high voltage power supply system in the smelting furnace of the electron beam region. There are many factors that cause the instability of the electrical parameters of the high voltage power supply system in the electron beam region. Aiming at the instability of the high voltage power supply system in the melting process of Mo alloy, this paper analyzes the causes of the instability of the electrical parameters, including the anode bar, the degree of vacuum, the coating produced by the melting process and the equivalent of high voltage power system itself Internal resistance, control circuit response time, and put forward the corresponding solutions. The results show that considering the above factors and taking corresponding measures, the instability problem of high voltage power supply system in regional melting process can be effectively solved.