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为了简化石英陀螺结构侧壁上的电极图形,设计了一种基于剪应力检测Coriolis力的新型石英微结构.通过对剪应力检测方案的分析,微结构侧壁电极的极性单一,采用锥度为15°的锥形梁结构作为敏感梁的设计可以增大敏感梁的检测灵敏度.通过各项异性湿法腐蚀z切石英片的方法制造了微结构样件.测试表明样件的驱动频率约为5.6kHz,大气下的品质因子在5000以上.输出信号频谱的谱线存在Coriolis力信号,验证了设计思想的正确性。
In order to simplify the electrode pattern on the side wall of the quartz gyro, a new quartz microstructure based on shear stress to detect Coriolis force was designed.According to the analysis of shear stress detection scheme, the polarity of the microstructure sidewall electrode is single and the taper is The design of 15 ° cone beam as a sensitive beam can increase the detection sensitivity of sensitive beams.The microstructure samples are manufactured by anisotropic wet etching method of z-cut quartz wafer.The test shows that the driving frequency of sample is about 5.6kHz, the quality factor under the atmosphere is above 5000. The Coriolis force signal exists in the spectrum of the output signal spectrum, which proves the correctness of the design idea.