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利用软膜紫外光固化纳米压印技术和反应离子刻蚀技术在玻璃衬底上制备了等离子体纳米孔阵列。为了实现高分辨低成本软膜紫外光固化纳米压印技术在生物传感领域的应用和产业化,必须对压印的一些具体工艺参数如压印压力进行优化。在这项工作中,压印压力最小化到10 psi,结果表明这一数值足以保证图案的精确复制以及图案转移的保真度。最后,利用反应离子刻蚀的方法去除残余光胶,并用剥离的方法进行图案转移,成功地制备出了均匀性良好的金纳米孔阵列。为了证明金属纳米周期结构在生物传感上的应用,使该阵列表面吸附蛋白质分子,结果观察到明显的透射峰偏移。
Plasma nanopore arrays were prepared on glass substrates by soft film UV-curable nanoimprint technique and reactive ion etching technique. In order to realize the application and industrialization of high-resolution and low-cost soft-film UV-curable nanoimprint technology in the biosensor field, some specific process parameters of imprinting, such as imprinting pressure, must be optimized. In this work, the impression pressure is minimized to 10 psi and the results show that this value is sufficient to ensure accurate pattern reproduction and fidelity of pattern transfer. Finally, the remaining photoresist was removed by reactive ion etching, and the pattern was transferred by lift-off method to successfully prepare a gold nanopore array with good uniformity. In order to prove the application of nanostructured metal nanostructures in biosensing, protein molecules were adsorbed on the surface of the array. As a result, a significant shift in peak transmission was observed.