一、前言范德堡(VDP)结构测试方法巳广泛用于扩散层、离子注入层均匀性、重复性测试中。人工进行此项工作,工作量大(对一个3吋母片内所有测试图形进行测试和数据处理约需3—5天时间),测量精度也难以保证。本文介绍利用PDP-11 LSI型计算机对VDP结构进行自动测试的原理和方法。采用各种措施确保自动测试总误差小于0.05%,数据处理中采用Grubbs方法对异常数据自动取舍,测试结果可由宽行打印机直接打印输出。目前,该项测试已成为集成电路生产过程中监控薄层电阻均匀性的有效工具之一。图1是对称的VDP测试结构示意图。如果 I. Introduction Van der Valk (VDP) structure test methods have been widely used in the diffusion layer, ion implantation layer uniformity, repeatability test. This manual work, heavy workload (a 3-inch mother of all test graphics test and data processing takes about 3-5 days time), the measurement accuracy is difficult to guarantee. This article describes the principle and method of using the PDP-11 LSI computer to automatically test VDP structures. A variety of measures to ensure that the total automatic test error is less than 0.05%, Grubbs method for data processing automatic selection of abnormal data, the test results can be printed directly by the wide line printer. At present, this test has become one of the effective tools for monitoring the uniformity of sheet resistance in the production of integrated circuits. Figure 1 is a symmetrical VDP test structure diagram. in case