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本文首先概述SUPREM-Ⅱ工艺模拟程序,介绍SUPREM-Ⅱ的功能及其程序结构和数据块结构。接着简要叙述我们对SUPREM-Ⅱ的移植及运用。
This article first outlines the SUPREM-II process simulation program, describes the function of SUPREM-II and its program structure and data block structure. Then briefly describe our transplant and use of SUPREM-Ⅱ.