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研制了一台压电陶瓷驱动和弹性铰链导向的一体化微定位平台,该微定位平台具有高刚度、高响应速度和高分辨率等优点。为了克服压电陶瓷驱动器伸长量较小的不足,采用杠杆放大机构增加微定位平台的位移输出。考虑驱动电路的影响,建立了微定位平台的机电耦合模型。通过试验研究了微定位平台的静动态特性,试验结果表明微定位平台的分辨率为5 nm,固有频率分别为143 Hz和180 Hz。该微定位平台可应用于纳米级的微定位。
A piezoceramic actuator and flexible hinge-oriented integrated micro-positioning platform was developed. The micro-positioning platform has the advantages of high rigidity, high response speed and high resolution. In order to overcome the lack of piezoelectric ceramic actuator elongation, the use of lever amplification mechanism to increase the micro-positioning platform displacement output. Considering the influence of driving circuit, the electromechanical coupling model of micro-positioning platform is established. The static and dynamic characteristics of the micro-positioning platform are experimentally studied. The experimental results show that the resolution of the micro-positioning platform is 5 nm and the natural frequencies are 143 Hz and 180 Hz respectively. The micro-positioning platform can be applied to nano-scale micro-positioning.