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上海电子器材厂应用现代控制论方法实现自动闭环直拉硅单晶。这项工作于一九七六年四月初开始,协作单位有中国科学院上海冶金研究所和上海师范大学数学系。目前正在试验投产。 控制用电子计算机是上海调节器厂生产的JS-10A。闭环控制拉晶的数学模型包括一个温度控制模型和一个直径控制模型。在引晶到放肩以及收尾阶段,由温度模型实现控制等径生产阶段由直径模型控制。 为了识别温度与功率的动态关系,我们采用了相关分析方法。由控制计算机连
Shanghai Electronic Equipment Factory Application of modern cybernetic method to achieve automatic closed-loop Czochralski silicon. The work began in early April 1976 with the collaboration of the Shanghai Institute of Metallurgy, Chinese Academy of Sciences and the Mathematics Department of Shanghai Normal University. It is currently put into trial production. Control computer is Shanghai regulator factory production of JS-10A. The mathematical model of closed-loop controlled crystal pulling includes a temperature control model and a diameter control model. In the seeding to put the shoulder and finishing stage, the temperature model to achieve control of the diameter of the production phase controlled by the diameter model. In order to identify the dynamic relationship between temperature and power, we used a correlation analysis method. Connected by the control computer