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激光光功率控制对激光加工技术极为重要,本文介绍了在激光直写系统中用于光功率控制的声光调制器件并根据光强稳定度要求分析结出了调制器的结构参数和相关的控制电路。接控制原理及调制器参数设计并实现的声光调制系统获得了好的光强控制效果。受控前He-Cd激光器输出光强稳定度为15%,控制后一级衍射光光强稳定度达0.2‰。
Laser light power control is very important for laser processing technology. This paper introduces the acousto-optic modulation device used for optical power control in the laser direct writing system and analyzes the structural parameters of the modulator and the related control according to the light intensity stability requirements Circuit. The control principle and modulator parameters design and implementation of acousto-optic modulation system to obtain a good light intensity control effect. The controlled He-Cd laser output intensity stability is 15% before control, and the intensity stability of the first order diffracted light reaches 0.2 ‰.