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同时,由于微电子技术工业化人生产的需要,从价值工程的观点出发,又出现了各种微细加工技术和设备之间的混合一匹配使用趋势,以便发挥各种技术的长处,最大限度地降低微电子产品的成本/性能比。所谓混合,指的是不同种技术或设备之间的相互配套使用,如电子束直接光刻与直接分步曝光机(DSW系统)和接触/接近式光刻机之间的混合使用。所谓匹配指同种设备或技术不同台号之间的配套使用。 微细加工设备是微电子技术发展的基础和重要手段,它的发展必然要受到上述发展
At the same time, due to the needs of the industrialized production of microelectronics, from the point of view of value engineering, there has been a mixed-use and one-use trend among various micro-fabrication technologies and devices in order to exert the advantages of various technologies to minimize Microelectronics product cost / performance ratio. The so-called hybrid refers to the mutual use of different technologies or devices, such as direct electron beam lithography and direct stepper (DSW system) and contact / proximity lithography between the mixed use. The so-called match refers to the same kind of equipment or technology supporting the use of different numbers. Microfabrication equipment is the basis and important means for the development of microelectronic technology. Its development must be subject to the above development