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介绍了研制成功的掩模投影式实用型准分子激光微细加工机的主要技术指标、结构特点、研制中解决的关键单元技术，并简要介绍其应用。
The main technical indexes, structural characteristics, the key unit technology to be solved in the research and development, and the application of the mask projection type practical excimer laser micromachining machine are introduced.