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本文介绍了微米和亚微米级激光聚焦光斑尺寸及能量分布的各种测试方法,分析和比较了各种方法的特点及实用性,方法适宣于对光盘存贮系统及应用激光的领域的微光斑性能的评价。
In this paper, various testing methods for spot size and energy distribution of micron and submicron laser focusing spots are introduced, and the characteristics and practicability of various methods are analyzed and compared. The method is suitable for the application in the field of optical disc storage system and applied laser Evaluation of spot performance.