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厚膜压力传感器为新型应变式压力传感器.具有工作温度范围宽、耐腐蚀、蠕变小、漂移小、成本低廉、性能/价格比高等特点.本文介绍其设计原理、构造、工艺,并对厚膜应变电阻工艺与力敏特性的影响进行了讨论.此外,对传感器的主要性能指标及应用也作了必要介绍.
Thick film pressure sensor is a new type of strain gauge pressure sensor with wide operating temperature range, corrosion resistance, small creep, low drift, low cost and high performance / price ratio.The paper introduces its design principle, structure, technology, Film strain-resistance process and force-sensitive characteristics are discussed.In addition, the main performance indicators of the sensor and its application are also introduced.