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为了优化LiFePO_4薄膜制备条件,提高LiFePO_4薄膜气敏元件的灵敏度,用水热法合成LiFePO_4并把它分散在聚乙烯醇(PVA)当中.利用旋转-甩涂法将LiFePO_4-PVA分散溶液涂抹于锡掺杂玻璃光波导表面,研制出LiFePO_4薄膜/锡掺杂玻璃光波导敏感元件;利用平面光波导检测系统对其气敏性进行研究.研究结果表明,分散剂质量分数为2%,超声波振荡时间为2 h,分散温度为25℃时,所制备出的敏感元件对二甲苯等苯类气体显出良好的气敏特性,其对二甲苯体积分数的检测范围为1×10~(-8)~1×10~(-3),分散之后,敏感元件对二甲苯等气体的检测灵敏度有所提高.
In order to optimize the preparation conditions of LiFePO_4 thin films and increase the sensitivity of LiFePO_4 thin film gas sensors, LiFePO_4 was synthesized by hydrothermal method and dispersed in polyvinyl alcohol (PVA). The LiFePO_4-PVA dispersion solution was applied to tin doped Doped glass optical waveguide sensor was fabricated on the surface of the hybrid glass optical waveguide and its gas sensitivity was measured by a planar optical waveguide detection system.The results showed that the mass fraction of dispersant was 2%, the ultrasonic oscillation time was 2 h, the dispersion temperature of 25 ℃, the prepared sensor sensitive to benzene and other benzene-based gas showed good gas-sensitive properties, the detection of p-xylene volume fraction of 1 × 10 -8 ~ 1 × 10 ~ (-3). After dispersion, the detection sensitivity of the sensitive element such as paraxylene is improved.