论文部分内容阅读
本文介绍一个应用于矢量扫描电子束系统中的定时校准的斜坡发生器。一个电流源对电容充电产生平滑的斜坡,为确保斜坡的线性,电容上的端电压被周期地调节到以12位数模转换器给定的参考电压,这是在很短的时间内(50~100nS)闭合一个开关来完成的。扫描速度相当于数字逐点式扫描电子束系统的500KH_Z~10MH_Z
This article describes a ramp generator for timing calibration in vector scanning electron beam systems. A current source charges the capacitor to produce a smooth ramp. To ensure linearity of the ramp, the terminal voltage on the capacitor is periodically adjusted to the reference voltage given by the 12-bit DAC. This is done in a very short period of time ~ 100nS) closed a switch to complete. Scanning speed equivalent to digital point-by-point scanning electron beam system 500KH_Z ~ 10MH_Z