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详细分析了激光测量系统测量误差产生的原因,并提出了补偿测量误差的方法,进而建立了HCM-Ⅰ型超精密车床激光测量误差补偿系统.系统分辨率为0.01μm.
The causes of the measurement error of the laser measurement system are analyzed in detail, and the method of compensating the measurement error is put forward. Then the laser measurement error compensation system of HCM-Ⅰ ultra-precision lathe is established. The system resolution is 0.01μm.