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介绍了压电微位移器在超微定位系统中的应用,给出了一种二维超微定位机构及其控制系统。实验结果:定位系统行程10 μm,定位精度10 nm,定位分辨力2 nm。
The application of piezoelectric microdisplacer in the micro-positioning system is introduced. A two-dimensional micro-positioning mechanism and its control system are given. Experimental results: Positioning system travel 10 μm, positioning accuracy 10 nm, positioning resolution 2 nm.