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The kinetics of MOCVD GaInAsSb and AlGaAsSb was studied by the growth rate as a function of growth temperature and partial pressure of Ⅲ and Ⅴ MO species. The diffusion theory was used to explain the mass transport processes in MOCVD Ⅲ-Ⅴ quaternary antimonides. On the basis of the discussion about their growth kinetics and epilayer properties, the good quality multi-epilayers of these two quaternary antimonides and their photodetectors and arrays with wavelength of 1.8～2.3 μm and detectivities of D*>109 cm Hz1/2 W-1 were obtained.