本文用HEMT小信号等效电路模型 ,考虑到HEMT与MESFET结构上的不同点 ,具体分析了HEMT小信号等效电路中串联电阻、寄生电感、寄生电容和本征元件参数的提取方法。采用这些方法 ,提取了HEMT器件 32 - 39GHz八个频率点的S参数值。实验结果表明 ,该方法简单有效 ,具有可操作性 In this paper, HEMT small signal equivalent circuit model, taking into account the HEMT and MESFET structural differences, the specific analysis of the HEMT small signal equivalent circuit series resistance, parasitic inductance, parasitic capacitance and intrinsic component parameters extraction method. With these methods, the S parameter values ​​of eight frequency points of HEMT device 32 - 39GHz are extracted. Experimental results show that this method is simple and effective and feasible