一、前言 AlN是一种Ⅲ-Ⅴ族化合物,属于六方晶系纤维锌矿结晶结构。由于氮化铝(AlN)的高温性能稳定、导热率大、并且绝缘性能好,所以,以往人们都把它看成是一种耐热绝缘材料。但是,近年来人们发现这种晶体的压电性较大,并且声速也大,所以作为可在高频段使用的压电材料而引起了人们的重视,并且有希望替代ZnO材料。迄今,人们采用真空蒸发、溅射、化学蒸发以及离子喷 I. INTRODUCTION AlN is a group III-V compound belonging to the hexagonal wurtzite crystal structure. Aluminum nitride (AlN) in the past as a heat-resistant insulating material in the past because of its high temperature stability, thermal conductivity, and good insulation properties. However, in recent years, it has been found that such a crystal has high piezoelectricity and a large sound velocity. Therefore, it has attracted people’s attention as a piezoelectric material that can be used in a high frequency range, and is promising to replace ZnO material. So far, people use vacuum evaporation, sputtering, chemical evaporation and ion spray