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针对微机械三维结构对准分子激光直写微细加工的要求，在试验研究基础上，讨论了硅已加工表面形貌、加工热与热影响区等特性，得出了加工脉冲数、能量与刻蚀深度间的相互关系。
According to the requirements of micromachined 3D laser micromachining process, based on the experimental research, the characteristics of machined surface such as machined surface and processing heat and heat affected zone are discussed. The pulse number, energy and moment The relationship between the depth of erosion.