集成电路是目前发展最快的领域,对今后科学技术的发展起着重要的作用。当前集成电路是用硅片制成的,因此硅的质量是研究的重大课题。已有不少关于这方面的评述。本文结合国内外最新研究的一些进展进行讨论。 一、概况 (一) 大规模集成电路发展的趋势 电子工业的发展使电子设备愈来愈复杂,需要愈来愈多的元件组装在一起,这样就造成了体积愈 Integrated circuits are the fastest growing areas and play an important role in the future development of science and technology. The current integrated circuit is made of silicon, so the quality of silicon is a major issue for research. There are a lot of comments in this area. This article discusses some of the latest developments at home and abroad. First, an overview (A) the development trend of large-scale integrated circuits The development of the electronics industry makes electronic devices more complex, more and more components need to be assembled together, thus resulting in volume more