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高温超导薄膜的微波性能受制备工艺和衬底材料性能的影响，常常出现空间不均匀分布，因此，无损检测大面积超导薄膜及衬底材料的微波性能，研究影响局域微波性能的因素，是高温超导微波器件应用研究中的一个重要方面．我们设计和制造了一套同轴谐振腔型微波近场扫描显微镜，利用该显微镜研究了金属薄膜样品微波表面电阻和介质材料的介电常数的空间分布，给出了其空间分辨率并分析了影响空间分辨率的因素．利用这套微波近场扫描显微镜，对大面积ＬａＡｌＯ３单晶衬底材料介电常数的空间分布进行了测量，并分析了其测量精度．最后，利用这套微波近场扫描显微镜，研究了ＹＢａＣｕＯ薄膜平面微波器件的微波表面电阻的分布情况，对影响其局域微波性能的因素做了初步分析
The microwave performance of high-temperature superconducting thin films is often unevenly distributed due to the influence of the preparation process and the properties of the substrate materials. Therefore, the microwave performance of large-area superconducting thin films and substrate materials is examined non-destructively to study the factors affecting the local microwave performance , Is an important aspect in the application of HTS microwave devices. We design and manufacture a coaxial resonant cavity microwave near-field scanning microscope. Using this microscope, we study the microwave surface resistance of metal thin films and the spatial distribution of the dielectric constant of the dielectric material. The spatial resolution of the samples is given and analyzed Factors Affecting Spatial Resolution. Using this microwave near-field scanning microscope, the spatial distribution of the dielectric constant of a large area LaAlO3 single crystal substrate was measured, and the measurement accuracy was analyzed. Finally, using this microwave near-field scanning microscope, the distribution of microwave surface resistance of YBaCuO thin-film planar microwave devices was studied and the factors influencing the local microwave performance were analyzed preliminarily