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采用光刻热熔法及离子束溅射刻蚀制作面阵石英柱微透镜阵列．表面探针和扫描电子显微镜的测试表明，在不同的工艺条件下制成的柱微透镜的表面轮廓具有明显的差异，给出了描述柱微透镜制作过程中的几个重要工艺参量的拟合关系式．
The lithography hot-melt method and ion beam sputter etching are used to fabricate a face-area quartz column micro-lens array. Surface probe and scanning electron microscope tests show that the surface profile of the column micro-lens made under different process conditions is obviously different, and the fitting of several important process parameters in the manufacturing process of the column micro-lens is given Relationship.