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在分析亚微米超精密数控车床样机误差源的基础上,采用在线测量和离线测量相结合的方法辨识误差补偿量,建立了误差补偿控制系统,实验结果表明所用的误差补偿策略是相当有效的。
Based on the analysis of the error source of the submicron ultra-precision CNC lathe prototype, the error compensation amount is identified by a combination of on-line measurement and off-line measurement. The error compensation control system is established. The experimental results show that the error compensation strategy is quite effective.