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系统响应率是光学读出微梁焦平面阵列(Focal Plane Array,FPA)红外成像的关键性能参数。在刀口滤波光学读出技术中,系统响应率的主要组成部分——光学读出灵敏度与微梁反光板的长度密切相关,并受到反光板弯曲变形的严重影响。由于残余应力在制作过程中不可避免地存在,微梁反光板都有弯曲变形,膜厚相同的反光板具有相同的变形曲率半径。本文利用傅里叶光学分析了反光板长度和弯曲变形对光学读出灵敏度的影响,构建并实验验证光学读出灵敏度理论模型。根据该模型,分析了系统响应率与反光板长度之间关系,理论分析与实验结果相符。结果表明,通过减薄SiNx厚度并使反光板处于该厚度下的最优长度,不仅能提高红外成像的系统响应率,而且能同时提高红外成像的空间分辨率。
The system response rate is a key performance parameter for optical readout of Focal Plane Array (FPA) infrared imaging. In the edge-filtering optical readout technology, the optical readout sensitivity, which is the main component of the system response rate, is closely related to the length of the microbeam reflector and is seriously affected by the bending deformation of the reflector. As the residual stress inevitably exists in the production process, the micro-beam reflector has bending deformation, the same thickness of the reflector has the same deformation radius of curvature. In this paper, the influence of reflector length and bending deformation on optical readout sensitivity was analyzed by Fourier optics, and a theoretical model of optical readout sensitivity was constructed and experimentally verified. According to the model, the relationship between the response rate of the system and the length of the reflector is analyzed. The theoretical analysis is consistent with the experimental results. The results show that by thinning the SiNx thickness and making the optimal length of the reflector under this thickness, not only can the system response rate of the infrared imaging be improved, but also the spatial resolution of the infrared imaging can be improved at the same time.