一、导言 七十年代初,首先是 Aisenbergerg(1)等人在真空室中用40eV的碳和氩离子打在不锈钢片上,淀积出了碳膜,膜的性质:透明,折射系数大于2.0,绝缘性高,能划伤玻璃,能长期耐酸腐蚀,电介常数在8到14之间,故称它为类金刚石膜。继后,Spencer〔2〕等人证实了Aisenberg的工作。 七 I. INTRODUCTION In the early 1970s, firstly, Aisenbergerg (1) et al. Used 40eV carbon and argon ions in a vacuum chamber on a stainless steel plate to deposit a carbon film. The properties of the film were: transparent, with a refractive index greater than 2.0, Insulation is high, can scratch the glass, can long-term acid corrosion, dielectric constant between 8 to 14, so it is called diamond-like film. Then, Spencer [2] and others confirmed Aisenberg’s work. Seven