论文部分内容阅读
介绍了四甲基氢氧化铵(TMAH)溶液的腐蚀特性,论述了在单晶硅和多晶硅高温压力传感器的制作过程中,TMAH腐蚀液在浓硼终止腐蚀和各向异性硅杯腐蚀两个制作工艺中的应用。通过大量的实验得到了较为理想的腐蚀条件,取得了较好的腐蚀结果。
The corrosion characteristics of tetramethylammonium hydroxide (TMAH) solution were introduced. The fabrication of TMAH etching solution in the etching process of concentrated boron and the anisotropic silicon cup corrosion were discussed in the fabrication process of single-crystal silicon and polysilicon high-temperature pressure sensor Application of technology. Through a large number of experiments have been the ideal corrosion conditions, and achieved good corrosion results.