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设计了一套集光、机、电为一体的新型纳米测量系统 :以激光为光源、双法 珀干涉仪及轻拍式探针为纳米传感部件、以柔性铰链机构的微动工作台为纳米扫描测试系统 ,并采用计算机数字PID实时控制处理 ;提出了通过测量双法 珀干涉仪透射光强基波幅值差或基波等幅值过零时间间隔的方法进行纳米测量的理论基础 ;理论分析了检测探针振动的方法 ;给出了基于柔性铰链机构的微动工作台的有限元设计新方法 ;设计了以电容传感器为精密位置反馈的PID闭环控制系统 ,解决了压电陶瓷等元件对系统造成的非线性影响 ;对系统误差进行了分析。
A novel nanometer measuring system integrating light, machine and electricity is designed. The laser is used as light source, the double Fabry-Perot interferometer and the tapping probe are used as the nanosensor. The fretting table with flexible hinge mechanism is Nano-scan test system, and real-time control of computer digital PID processing is proposed. The theoretical basis of nanometer measurement is proposed by measuring the amplitude difference of transmitted light intensity or the zero-crossing time of fundamental wave with double-law Perot interferometer. The method to detect probe vibration is analyzed theoretically. A new method of finite element design based on flexible hinge mechanism is proposed. A closed-loop PID closed-loop control system based on capacitive sensor is designed. Piezoceramic Components of the nonlinear system caused by the impact of the system error were analyzed.