前言电荷耦合器件(CCD)是七十年代才开始发展起来的一种新型半导体器件,它已广泛地用于各有关领域。在我国,CCD的研究工作正加紧进行,但测试手段尚不完善,由于我所科研的需要,我们研制了“电荷耦合器件电极短路自动测试仪”。我们知道,CCD管芯上各相邻电极之间间距很小,一般在几微米左右。由于工艺方面的原因,很容易造成各电极之间、电极和衬底之间的短路现象。器件一旦出现上述的 Introduction Charge Coupled Device (CCD) is a new type of semiconductor device that began to develop in the seventies. It has been widely used in various fields. In our country, CCD research work is stepping up, but the test method is not perfect. Due to the need of our research, we developed the “Electrode Coupling Device Short Circuit Automatic Tester”. We know that the spacing between adjacent electrodes on a CCD die is small, typically around a few microns. Due to technical reasons, it is easy to cause short circuit between the electrodes, the electrode and the substrate. Once the device appears above