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建立了等离子体基离子注入过程中试样温度预测的理论模型 ,应用这个模型进行了一系列数学模拟 .以纯铝为例测定了在不同的注入条件下试样的温度变化 ,得到的实验结果与数学模拟相符合 .试验表明 ,低功率注入时 ,系统达到热平衡的时间较长 ,而且热平衡温度低 ;随功率的上升 ,试样升温加快 ;注入功率密度高时 ,试样容易在注入过程中达到平衡温度 ,而且其平衡温度受注入功率的影响较小 ;试样的尺寸也是影响试样温度平衡的一个主要因素 .在此基础上提出了在等离子体基离子注入过程中控制试样温度的方法
A theoretical model for predicting the temperature of the sample during plasma-based ion implantation was established, and a series of mathematical simulations were carried out by using this model.With the pure aluminum as an example, the temperature of the sample under different injection conditions was measured and the experimental results The simulation results show that the system achieves thermal equilibrium for a long time and has low thermal equilibrium temperature with low power injection. With the increase of power, the temperature of the sample increases rapidly. When the injection power density is high, the sample is easy to reach in the process of injection And the equilibrium temperature is less affected by the injected power. The size of the sample is also a major factor affecting the temperature balance of the sample, and a method of controlling the temperature of the sample during plasma-based ion implantation is proposed