一种原位测量轨道原子氧效应的电阻型传感器(英文)

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为了发展原子氧环境及其效应飞行实验技术,获得在轨飞行实验数据,北京卫星环境工程研究所研制了一种小型、低成本的原子氧环境及其效应探测器。这种探测器的传感器采用对原子氧敏感的导电材料制备电阻膜。电阻膜在飞行试验中遭遇到原子氧剥蚀。在轨道飞行实验中,通过原位监测受原子氧剥蚀传感器电阻值的变化,可以探测原子氧环境通量密度及被试验样品的原子氧剥蚀率。目前,采用电镀法及紫外线光刻和金属刻蚀微加工技术,已经成功制备了原子氧通量密度锇膜电阻传感器。它可以测量原子氧的通量密度和积分通量,在400~500km的轨道高度工作寿命约为1年。原子氧效应探测器是在石英玻璃基底上淀积银膜,试验材料膜涂覆在银膜上。试验材料膜在轨与原子氧反应而变得越来越薄,当其被完全剥蚀后,暴露出来的银膜迅速被氧化,并且电阻变大。试验材料膜的剥蚀时间可以确定,试验材料的原子氧剥蚀率就可以计算出来。 In order to develop atomic oxygen environment and its effect flight experiment technology and acquire experimental data in orbit, Beijing Satellite Environmental Engineering Research Institute has developed a small and low cost atomic oxygen environment and its effect detector. The sensor of this detector uses a conductive material that is sensitive to atomic oxygen to prepare a resistive film. Resistive membranes were subjected to atomic oxygen ablation in flight tests. In the orbital flight experiment, the in situ monitoring of atomic oxygen erosion sensor resistance value changes, can detect atomic oxygen environment flux density and the test sample of atomic oxygen erosion rate. Currently, the use of electroplating and UV lithography and metal etching micro-machining technology, has successfully prepared the atomic oxygen flux density osmium membrane resistance sensor. It can measure atomic oxygen flux density and the integral flux, in the 400 ~ 500km orbital altitude working life of about 1 year. Atomic oxygen effect detector is deposited on a quartz glass substrate silver film, the test material film is coated on the silver film. Experimental materials in the rail and atomic oxygen react to become thinner and thinner, when it is completely eroded, the exposed silver film is rapidly oxidized, and the resistance becomes larger. The erosion time of the test material film can be determined, and the atomic oxygen erosion rate of the test material can be calculated.
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