一、前言制作薄膜的时候,在蒸镀过程中监控膜厚是很重要的。直到现在已不断发展和利用了各种各样的方法。这些方法分为电学方法,机械方法和光学方法。测定石英振荡器振荡频率的变化,测定薄膜的电阻等等属于电学方法;用微量天平测定附着在基板上的粒子质量属于机械方法;用肉眼观察干涉颜色、测定反射率或者透过率、测定偏振光以及干 I. Introduction When making a film, it is important to monitor the film thickness during the evaporation process. Until now, a great variety of methods have been developed and utilized. These methods are divided into electrical methods, mechanical methods and optical methods. Determination of quartz oscillator oscillation frequency changes, the film resistance measurement and so belongs to the electrical method; Determination of micro-scale attached to the substrate particle quality belongs to the mechanical method; Observe the interference color with the naked eye, reflectance or transmittance was measured to measure the polarization Light and dry