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在高功率准分子系统中,为实现窄脉宽激光放大和满足辐照均匀性的要求,采用了光学角多路技术,系统光束数量多、传输环节多,具有很高的光学复杂性。为保证系统高效稳定运行,需要实时监测和评价各个环节的工作状态,即对“平台”中每一放大级和众多光束的激光参数进行在线诊断和测量。为此,针对高功率准分子激光系统的特点,提出了一种分时测量技术,并进行了原理性实验研究。该技术可采用一套测试元件实现多路激光能量和波形参数的在线测量,优点是不仅可以提高测试效率,可降低测试系统的复杂度和造价,而且可避免由不同测量元件带来的系统误差。
In the high-power quasi-molecular system, in order to achieve narrow pulse width laser amplification and meet the requirement of irradiance uniformity, optical multi-path technique is adopted. The system has many optical beams and many transmission links, and has high optical complexity. To ensure efficient and stable operation of the system, it is necessary to monitor and evaluate the working status of each link in real time, that is, to diagnose and measure the laser parameters of each amplification stage and many light beams in the Platform. Therefore, aiming at the characteristics of high power excimer laser system, a time-sharing measurement technique is proposed and a theoretical experiment is carried out. The technology enables the on-line measurement of multi-channel laser energy and waveform parameters using a single set of test elements with the advantage of not only improving test efficiency, reducing the complexity and cost of the test system, but also avoiding systematic errors caused by different measurement elements .