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利用聚合物SU-8光刻胶在激光作用下折射率会发生变化的特点,将其作为最后的光学材料,采用光刻胶热熔法和图形转移法,设计并制作了填充因子接近0.75、自写入光波导、六角排列的微透镜阵列。对阵列的表面形态、三维结构和光学性能分别进行了观察、测试与分析,发现用SU-8胶制作的微透镜阵列外观良好,边缘清晰;自写入光波导微透镜阵列的三维结构良好;波导末梢的光点分布均匀,光强一致性高。这种自写入光波导的微透镜阵列降低了透镜阵列与探测阵列精确装配的难度,而且其制作工艺流程简单、成本低廉、适合批量复制,这种阵列元件还有质量轻、体积小的特点,有很广的应用前景。
The refractive index of polymer SU-8 was changed under laser irradiation. As the last optical material, the photoresist was designed and fabricated by the hot melt method and the pattern transfer method. The filling factor was nearly 0.75, Self-written optical waveguides, hexagonal arrays of microlenses. The surface morphology, three-dimensional structure and optical properties of the arrays were observed, tested and analyzed respectively. The results showed that the microlens array fabricated with SU-8 adhesive had a good appearance and a clear edge. The three-dimensional structure of self-writing optical waveguide microlens arrays was good. Waveguide tip uniform distribution, high consistency of light intensity. The self-writing micro-lens array of optical waveguides reduces the difficulty of precise assembly of the lens array and the probe array, and has the advantages of simple manufacturing process, low cost and suitable for batch copying. The array element also has the characteristics of light weight and small volume , There is a wide range of applications.