本文继续探讨研制一种新型真空泵的可能性。利用静电马鞍场约束电子振荡并注入电子以扩展放电压强的下限。据此,研制的无磁静电型溅射离子泵,在未注入电子时,阴极小室内壁面,可清楚地看到,离子轰击面(即钛的溅射面)与钛膜沉积面,其状态与二极型 penning 泵相似;启动特性、对电源要求也与 penning 泵相似。硅油蒸汽对马鞍场约 This article continues to explore the possibility of developing a new type of vacuum pump. The electrostatic field is used to constrain the electron oscillation and inject electrons to extend the lower limit of discharge pressure. Therefore, the non-magnetic electrostatic sputter ion pump developed, when not injected electrons, the inner wall of the cathode chamber, it can be clearly seen that the ion bombardment surface (ie titanium sputtering surface) and titanium deposition surface, the state Similar to the bipolar penning pump; start-up features, similar to the penning pump for power requirements. Silicone steam on the saddle field approx