前言 氩气化学性质极不活泼,因而被称为惰性气体。在电子工业中,作为保护气、运载气及稀释气得到广泛应用。由于电子工业对电子元器件,电路及材料制备过程中超纯超净要求很高。因此,希望氩气的纯度,也尽可能高。所含尘埃尽可能少,以避免由于氩气所含杂质造成的污染。 但是,由于种种原因,氩气的纯度达不到 Introduction Argon chemistry is extremely inert and is therefore known as inert gas. In the electronics industry, as carrier gas and carrier gas are widely used. As the electronics industry on the electronic components, circuits and materials in the preparation of ultra-pure ultra-clean demanding. Therefore, it is desirable that the purity of argon be as high as possible. Contains as little dust as possible to avoid contamination due to impurities contained in the argon gas. However, due to various reasons, the purity of argon is not reached