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电磁驱动电容检测的力平衡微机械陀螺相对于压阻检测等方式的其他形式的微机械陀螺来说,具有高灵敏度及高精度的突出优点,但是其接口电路也比较复杂。这一接口电路从功能上可分为驱动电路和检测电路两个部分:驱动电路的主要功能是使微机械陀螺产生在驱动模态固有频率下的振幅稳定的正弦振动;检测电路的主要功能是拾取陀螺所产生的角速度信号。为了提高陀螺的工作带宽和线性度,检测电路采用了力平衡方式。本文从微机械陀螺接口电路的工作原理、传输函数和稳定性等方面分析了这种形式的微机械陀螺的接口电路。并介绍了接口电路中用到的几种主要器件。
Electromagnetic drive capacitance detection MEMS micromechanical gyroscope relative to the piezoresistive detection of other forms of micro-mechanical gyroscope, with high sensitivity and high precision outstanding advantages, but the interface circuit is also more complex. The interface circuit can be divided into two parts: the driving circuit and the detecting circuit. The main function of the driving circuit is to make the micromechanical gyroscope produce sinusoidal vibration of stable amplitude under the natural frequency of driving mode. The main function of the detecting circuit is Pick up the gyros generated by the angular velocity signal. In order to improve the work of the gyro’s bandwidth and linearity, the detection circuit using a force balance. This paper analyzes the interface circuit of this kind of micro-mechanical gyro from the working principle, transfer function and stability of the micro-mechanical gyro interface circuit. And introduced the interface circuit used in several major components.