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在分子动力学研究的基础上建立了载能原子的沉积动力学物理模型 ,并根据在局域环境下的表面原子扩散模型 ,通过运动学MonteCarlo方法研究了载能粒子沉积Au/Au(10 0 )薄膜的初期生长过程 ,探讨了载能粒子沉积对薄膜生长的影响及其随基体温度的变化 .通过计算机模拟发现 :载能粒子沉积的Au/Au(10 0 )薄膜生长仍然呈现层状生长 三维岛状生长 准二维层状 .在薄膜生长初期 ,载能粒子的作用是促进表面原子的成核 ,增加基体表面的缺陷 ;在薄膜的生长阶段 ,载能粒子通过抑制三维岛的生长速率起着平滑薄膜表面形貌的作用 .载能粒子是通过改变薄膜局域表面形貌而影响着薄膜的生长行为 ,而表面原子扩散能力则是决定薄膜生长模式的关键因素
Based on the study of molecular dynamics, a physical model of depositional dynamics of carrier atoms was established. According to the model of surface atom diffusion in local environment, the kinetic MonteCarlo method was used to study the deposition of Au / Au (100 ) On the growth of thin films and the effect of carrier particle deposition on the growth of the thin films and their changes with the substrate temperature were investigated by computer simulation.The results show that the growth of Au / Au (10 0) films deposited by carrier particles still shows layered growth Three-dimensional island-like growth quasi-two-dimensional layer.In the initial film growth, the role of carrying particles is to promote the nucleation of the surface atoms, increasing the substrate surface defects; in the film growth phase, carrying particles by inhibiting the growth rate of three- Plays a role in smoothing the morphology of the surface of the film.The carrying capacity of the particles affects the growth behavior of the film by changing the surface morphology of the film and the surface atomic diffusion ability is the key factor that determines the film growth pattern