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等离子源离子注入等离子源离子注入(PSII)是一种新的材料表面改性技术,虽然仍在开发阶段,但很有开发潜力,转入工业化后,有可能用来处理大型工具及成垛的工件(如齿轮)而无须将工件进行横向及周向转动。这种离子注入的原理是将工件置于真空室中,在真空室内生成...
Plasma Source Ion Implantation Plasma Source Ion Implantation (PSII) is a new material surface modification technology that, while still under development, has potential for development and may be used to process large tools and stack Workpiece (such as gear) without the workpiece to be horizontal and circumferential rotation. The principle of this ion implantation is to place the workpiece in the vacuum chamber and generate in the vacuum chamber ...