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较系统的对目前应用的石英晶体测厚的三个公式进行了明晰的物理分析和比较.指出了它们之间的内在联系、相对误差、准确性,以及在多次沉积和微量沉积中的应用条件.从而得出有关设计.分析、挑选和应用石英晶体膜厚监控仪的有用结论.采用模拟电路的第一代石英晶体膜厚仪控制精度不高.但把使用(3)式作为三代石英晶体膜厚仪的标志是不科学的.(1)、(2)、(3)各式.都有它的运用条件.不可不加限制地乱用。最好的办法是由用户根据使用情况自主选择.以便在保证计算精度的前提下使运算尽量简单.仪器成本尽量低廉.
The systematic comparison and analysis of the three formulas of the currently used quartz crystal thickness gauge are systematically carried out, and the inherent relations, relative errors and accuracy between them and their application in multiple deposition and micro deposition are pointed out Conditions.And then draw useful conclusions about the design, analysis, selection and application of quartz crystal thickness monitor.Using analog circuits of the first generation of quartz crystal thickness gauge control accuracy is not high, but the use of (3) as the three generations of quartz Crystal film thickness instrument is unscientific. (1), (2), (3) all kinds of. All have its conditions of use. Can not be arbitrary use of confusion. The best way is to choose by the user according to the use of the situation in order to ensure the accuracy of the calculation under the premise of making the operation as simple as possible. Instrument costs as low as possible.