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It was studied that how the CO_2 laser lines affect the characteristics of silicon nitride powders synthesized by laser-induced chemical vapor deposition (LICVD). A new method was proposed for nanosized silicon nitride synthesis, and it is called double optical beam LICVD. The stoichiometric silicon nitride nanopowders with high purity were produced by using this new method. The ratio of N/Si of the powder is as high as 1. 321 which is very close to the ideal value of 1. 333.
It was studied that how the CO 2 laser lines affect the characteristics of silicon nitride powders synthesized by laser-induced chemical vapor deposition (LICVD). A new method was proposed for nanosized silicon nitride synthesis, and it is called double optical beam LICVD. The stoichiometric silicon nitride nanopowders with high purity were produced by using this new method. The ratio of N / Si of the powder is as high as 1. 321 which is very close to the ideal value of 1. 333.