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用电子束蒸镀和二极直流溅射方法分别制备了钴铬垂直磁化薄膜。1)用VSM及X射线薄膜磁化强度取向摆动曲线的Δθ50等方法做了磁性等测量,结果表明蒸镀和溅射两种方法都能制备出优质钴铬垂直磁化薄膜;2)对Co-Cr垂直磁化薄膜的成分分布及微观形貌用高分辨透射电镜作了晶粒形貌、选
Cobalt-chromium perpendicular magnetization films were prepared by electron beam evaporation and two-pole DC sputtering. 1) Magnetic measurements were carried out by means of the Δθ50 of the magnetization of VSM and X-ray film. The results show that high-quality cobalt-chromium vertical magnetization films can be prepared by both deposition and sputtering methods. 2) Composition and microstructure of the perpendicular magnetization film were characterized by high resolution transmission electron microscopy