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通过两步法在普通载玻片上成功制备了具有六角纤锌矿结构且沿(002)衍射峰c轴择优取向生长的铕掺杂氧化锌(ZnO∶Eu3+)薄膜。首先利用CS-300直流磁控溅射镀膜机在载玻片上制备ZnO种子层,然后利用水热法在ZnO种子层上生长ZnO∶Eu3+薄膜。利用X射线衍射(XRD)谱分析表明,Eu3+掺杂使薄膜的结晶度降低,平均晶粒尺寸变小,且(002)衍射峰的峰位向小角度偏移。采用扫描电子显微镜(SEM)观察薄膜的表面形貌,膜层表面颗粒分布均匀致密。室温光致发光(PL)谱测试表明,ZnO基质与Eu3+之间存在有效的能量传递,325 nm的波长激发下,在波长615 nm左右观察到强而尖锐的红色特征峰,最佳掺杂比为5%;该实验结果为扩大ZnO∶Eu3+薄膜的应用领域提供了部分依据。
The europium-doped zinc oxide (ZnO: Eu3 +) thin films with hexagonal wurtzite structure and well-aligned orientation along the c-axis of the (002) diffraction peak were successfully prepared on ordinary glass slides by a two- Firstly, ZnO seed layer was prepared on a glass slide using a CS-300 DC Magnetron Sputtering Coater, and ZnO: Eu3 + thin film was grown on ZnO seed layer by hydrothermal method. The results of X-ray diffraction (XRD) analysis show that Eu3 + doping decreases the crystallinity and the average grain size of the films, and shifts the peak position of the (002) diffraction peak to a small angle. Scanning electron microscopy (SEM) was used to observe the surface morphology of the film. The surface of the film was evenly and densely distributed. At room temperature, photoluminescence (PL) spectra showed that there was an effective energy transfer between the ZnO matrix and Eu3 +. Strong and sharp red peaks were observed at a wavelength of 615 nm when excited at 325 nm. The best doping ratio Is 5%. The experimental results provide some basis for expanding the application field of ZnO: Eu3 + film.