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Au-Si 系统是一种典型的共晶体系。B.X.Liu 等通过对 Au 与 Si 迭层膜的研究得到多种组分比和相结构的 Au 与 Si 的混合层~([1]);S.S.Lau 等通过对 Au 膜-Si 衬底样品的研究0得到过 Au_(71)Si_(29)(～Au_5Si_2)亚稳相~([2])。本文在更宽的离子束参数及更宽的温区(77—573K)下,系统地研究了 Ar 离子束诱导的 Au 膜-Si衬底体系的原子混合现象,
Au-Si system is a typical eutectic system. BX Liu et al. Obtained a mixed layer of Au and Si with various composition ratios and phase structures by studying Au and Si laminated films [(1)); SSLau et al. 0 has been Au_ (71) Si_ (29) (~ Au_5Si_2) metastable phase ~ ([2]). In this paper, the atomic mixing phenomenon of Au film-Si <111> substrate system induced by Ar ion beam is systematically investigated under wider ion beam parameters and wider temperature range (77-573K)