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本文概述了最近十年来国外合成立方氨化硼薄膜的各种方法,指出了各种沉积技术的特点,并给出了试验条件、影响因素及合成立方氮化硼薄膜的红外吸收波谱.
This paper summarizes the various methods of synthesizing cubic boron nitride films abroad in the recent ten years, points out the characteristics of various deposition techniques, and gives the experimental conditions, the influencing factors and the infrared absorption spectra of the synthesized cubic boron nitride films.