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1 概述不论接触式还是非接触式轮廓仪,在表面测量中标准轮廓样块起到非常重要的作用.对触针式仪器需用专门设计的波形,测量表面极均匀的不同的标定样块来标定各种仪器性能.阶梯式高度样块用来标定触针式仪器的垂直放大率;而带有精细沟槽的样块用来检查触针状况;呈正弦曲线变化的样块用来检查电子滤波器的特性及综合水平放大特性,但一般来说,带有周期性或随机性的样块主要用来全面的检查触针式仪器对参数的读
1 Overview Standard profile samples play an important role in the surface measurement, whether contact or non-contact profilers. For stylus instruments, specially designed waveforms are required to measure different calibration samples with very uniform surfaces Calibration of various instrument performance. The stepped height block is used to calibrate the vertical magnification of the stylus instrument; the sample with fine grooves is used to check the stylus condition; the sinusoidal change block is used to check the electronic Filter characteristics and the overall level of amplification characteristics, but in general, with periodic or random sample is mainly used to comprehensively check the stylus instrument to read the parameters