微谐振器是试飞测试系统的重要组成部件,微谐振器的性能影响到试飞测试系统的精确度。为了提高微谐振器的性能,在传统结构的基础上,提出改变微谐振器中折叠梁、驱动梳齿等结构的尺寸来改善其性能。运用有限元法对不同结构尺寸下的微谐振器进行模态、品质因子分析。仿真结果表明,横向微谐振器的一阶模态频率的大小很大程度上受到折叠梁尺寸的影响;静电梳齿的尺寸设计中,梳齿的宽度是影响驱动力和品质的一个关键因素。仿真结果表明,对提高微谐振器的性能具有一定的指导意义。 The microresonator is an important part of the flight test system. The performance of the microresonator affects the accuracy of the flight test system. In order to improve the performance of the micro-resonator, based on the traditional structure, it is proposed to change the size of the structure such as the folding beam and the driving comb in the micro-resonator to improve its performance. The finite element method is used to analyze the modal and quality factors of the microresonator with different structure dimensions. The simulation results show that the first order modal frequency of the transverse microresonator is greatly affected by the size of the folded beam. The width of the comb teeth is a key factor affecting the driving force and quality in the design of electrostatic comb teeth. The simulation results show that it is of guiding significance to improve the performance of the microresistor.