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采用质谱技术实时研究了金属有机源DIPTe和DMCd在MOCVD反应器中热裂解的性质.着重分析了可能发生的气相反应及热裂解机理,并探讨了在CdTe,HgCdTe实际生长条件下两个有机源之间可能发生的相互作用及其对热裂解温度的影响.
The properties of pyrolysis of metal organic sources DIPTe and DMCd in MOCVD reactor were studied in real time by mass spectrometry. The possible gas phase reaction and pyrolysis mechanism were analyzed emphatically. The effects of two organic sources (CdTe, HgCdTe) The possible interactions and their effects on pyrolysis temperature.