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本文报导采用典型的微电子学工艺一丝网漏印法制备以SnO_2为基的厚膜气体传感器。研究了不同掺杂剂和玻璃料对厚膜气敏材料性能的影响,结果显示ZrO_2掺杂有助于提高厚膜气体传感器对一氧化碳和乙醇的选择性,而且气体传感元件的厚膜工艺设备筒单,便于生产。
This paper reports the preparation of a SnO_2-based thick-film gas sensor using a typical micro-electronics screen-slip method. The effects of different dopants and glass frits on the performance of thick film gas-sensing materials were studied. The results show that ZrO 2 doping can help to increase the selectivity of thick-film gas sensors to carbon monoxide and ethanol, and the thick film process equipment of gas sensing elements Simple, easy to produce.